| 品牌：日本CANON-ANELVA | 型号：UGD-1S | 产品别名：离子规 |
| 用途：离子规 | 适用行业：离子规 | 产品用途：离子规 |
| 规格：离子规 |
UGD-1S日本CANON-ANELVA离子规/真空计/真空计测定球
UGD-1S日本CANON-ANELVA离子规/真空计/真空计测定球
| Type | LG-11S | UGD-1S | BRG-1B | |
|---|---|---|---|---|
| Gauge Type | Shultz Gauge | B-A Gauge | Wide Range B-A Gauge | |
| Shape | Glass tube | |||
| Connection with measured vacuum chamber | φ15 gauge port (O ring) | |||
| Recommended measurement range | 10-2 to 100 Pa | 10-6 to 0.1 Pa | 10-6 to 10 Pa | |
| Standard sensitivity | 0.0038Pa-1with respect to air | 0.075Pa-1 with respect to N2 | ||
| X ray limit | <10-4Pa | Approx. 1.3×10-8Pa | ||
| Baking temperature | 400℃(150℃ or less with O ring seal) | |||
| Material | Filament | Thoria-coated iridium (×1) | Tungsten (×2) | Thoria-coated iridium (×1) |
| Body | Kovar glass (vacuum sealed) | Tungsten glass (open) | ||
| Supported vacuum gauge power supply | NI-10D* | M-722HG·NI-10D* | M-823HG | |
| Applications | High pressure (100Pa to 102Pa) measurement gauge, sputter, etc. | General vacuum use | B-A gauge, sputter etc. measurable up to high pressure (10Pa) |
Nude Ion Gauge NIG-2F/NIG-2TF
| Type | NIG-2F 954-7902 | NIG-2TF 954-7903 |
|---|---|---|
| Gauge Type | Nude Type B-A | |
| Shape | Nude Type | |
| Connection with measured vacuum chamber | φ70ICF | |
| Recommended measurement range | 10-9 to 10-2Pa | |
| Standard sensitivity | 0.19Pa-1 with respect to N2 | |
| X ray limit | Approx. 2.7×10-9Pa | |
| Baking temperature | 400℃ | |
| Filament | Filament material: Tungsten (×2) | Filament material: Yttria-coated iridium (×2) |
| Supported vacuum gauge power supply | M-923HG·NI-10D* | |
| Applications | Up to 10-9Pa | |
| Ultra-high vacuum equipment (for bakable equipment) |
Pirani Gauge PG-150／Thermocouple Gauge TG-550C
| Type | PG-150 | |
|---|---|---|
| Gauge Type | Pirani Gauge | |
| Shape | Metal vessel | |
| Connection with measured vacuum chamber | φ15 gauge port (O ring) | |
| Measurement range | 10-1 to 133Pa | |
| Material | Body | Stainless steel (SUS-304) |
| Supported vacuum gauge power supply | MPG-011 MPG-012 | |
| Applications | Measurement during roughing pump |
| Type | TG-550C | |
|---|---|---|
| Gauge Type | Thermocouple Gauge | |
| Shape | Metal vessel | |
| Connection with measured vacuum chamber | φ15 gauge port (O ring) | |
| Measurement range | 10-1 to 200Pa | |
| Material | Body | Stainless steel (SUS-304) |
| Supported vacuum gauge power supply | M-012DM M-722HG/822HG/833HG/922HG | |
| Applications | Measurement during roughing pump |
